Study on High-Rigidity Six-Degree-of-Freedom Fine Motion Mechanism
High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism
using Piezoelectric Actuators
Takaaki OIWA, Katsumi KANEKO, Takeshi KANEKO and Akira KYUSOJIN
In this paper, a new five-degrees-of-freedom fine motion mechanism whose rigidity is high is proposed, and the construction and the experimental results are also described for the characteristics of newly developed three-degrees-of-freedom mechanism. This mechanism comprises three wedge-shaped plates and six multi-layered piezoelectric actuators. The mechanism which requires neither guide plane nor lubrication enables it to move without any friction, wear and backlash. The maximum movements of the stage were 3 micrometers in X-direction, 12 micrometers in Z-direction and 12 second of arc in b-direction. The positioning resolutions in the translational and rotational directions were less than 0.01 micrometer and 0.01 second of arc, respectively. The loading capacity was 400 N. The positioning errors and the motion error were less than 0.01 micrometer and 0.03 second of arc. 1 micrometer step positioning in X-direction interfered with other directions transiently because of difference of the contraction and expansion velocities of the piezoelectric actuators.
Key words: multi-degrees-of-freedom mechanism, positioning, fine motion mechanism, PZT actuator, wedge plate mechanism
High-Rigidity Multi-Degree-of-Freedom Fine Motion Mechanism
using Piezoelectric Actuators (2nd Report)
|Extension to Six-Degrees-of-Freedom|
Takaaki OIWA, Tsuyoshi KAMIURA and Akira KYUSOJIN
The purpose of this study is to propose a new six-degree-of-freedom fine motion mechanism with high rigidity. It has the following characteristics: (1) the loading capacity of the fine motion stage is large; (2) this mechanism requires neither guide plane nor lubrication, and moves without any friction, wear and backlash; (3) each one-degree-of-freedom motion does not interfere with the others. In the previous report, fine motion mechanism which has five-degrees-of-freedom except the rotational direction around Z-axis was proposed. In this paper, the remaining one-degree-of-freedom fine motion mechanism or g-stage is proposed. The construction and the experimental results were described for newly developed g-stage. The maximum movement of the stage was 2 arcsec in g-direction at 400 N load. The positioning resolution was less than 0.02 arcsec in g-direction. The positioning error and motion errors were less than 0.01 micrometers and 0.02 arcsec. Transient interference observed in the previous paper was decreased from 0.3 micrometer to 0.06 micrometer by employing velocity feedback system.
Key words: multi degree of freedom mechanism, positioning, high rigidity, fine motion mechanism, piezoelectric actuator, wedge plate mechanism
Takaaki OIWA et al.:
Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micro-positioning stage
Review of Scientific Instrument, 76, 2(2005)
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